@inproceedings{0e792feb4e9a4fb38635d091e75ffe74,
title = "III-As pillar arrays by metal-assisted chemical etching for photonic applications",
abstract = "Ordered arrays of GaAs/InGaAs micro and nanopillars are formed by metal-assisted chemical etching (MacEtch). The dependence of morphology and etch rate upon temperature, etchant composition, and doping concentration are explored and optical characteristics are discussed.",
author = "Mohseni, {Parsian K.} and Lei Pan and Xiang Zhao and Kim, {Seung Hyun} and Karthik Balasundaram and Kim, {Jeong Dong} and Coleman, {James J.} and Xiuling Li",
year = "2013",
doi = "10.1364/cleo_si.2013.cth1j.3",
language = "English (US)",
isbn = "9781557529725",
series = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
publisher = "IEEE Computer Society",
booktitle = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
note = "2013 Conference on Lasers and Electro-Optics, CLEO 2013 ; Conference date: 09-06-2013 Through 14-06-2013",
}