III-as pillar arrays by metal-assisted chemical etching for photonic applications

Parsian K. Mohseni; Lei Pan; Xiang Zhao; Seung Hyun Kim; Karthik Balasundaram; Jeong Dong Kim; James J. Coleman; Xiuling Li

III-as pillar arrays by metal-assisted chemical etching for photonic applications

Parsian K. Mohseni, Lei Pan, Xiang Zhao, Seung Hyun Kim, Karthik Balasundaram, Jeong Dong Kim, James J. Coleman, Xiuling Li

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Ordered arrays of GaAs/InGaAs micro and nanopillars are formed by metal-assisted chemical etching (MacEtch). The dependence of morphology and etch rate upon temperature, etchant composition, and doping concentration are explored and optical characteristics are discussed.

Original language	English (US)
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO_SI 2013
Pages	CTh1J.3
State	Published - 2013
Event	CLEO: Science and Innovations, CLEO_SI 2013 - San Jose, CA, United States Duration: Jun 9 2013 → Jun 14 2013

Publication series

Name	CLEO: Science and Innovations, CLEO_SI 2013

Other

Other	CLEO: Science and Innovations, CLEO_SI 2013
Country/Territory	United States
City	San Jose, CA
Period	6/9/13 → 6/14/13

ASJC Scopus subject areas

Computer Networks and Communications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

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@inproceedings{5c92f411090a46fbb2a7a025638107a1,

title = "III-as pillar arrays by metal-assisted chemical etching for photonic applications",

abstract = "Ordered arrays of GaAs/InGaAs micro and nanopillars are formed by metal-assisted chemical etching (MacEtch). The dependence of morphology and etch rate upon temperature, etchant composition, and doping concentration are explored and optical characteristics are discussed.",

author = "Mohseni, {Parsian K.} and Lei Pan and Xiang Zhao and Kim, {Seung Hyun} and Karthik Balasundaram and Kim, {Jeong Dong} and Coleman, {James J.} and Xiuling Li",

year = "2013",

language = "English (US)",

isbn = "9781557529725",

series = "CLEO: Science and Innovations, CLEO_SI 2013",

pages = "CTh1J.3",

booktitle = "CLEO",

note = "CLEO: Science and Innovations, CLEO_SI 2013 ; Conference date: 09-06-2013 Through 14-06-2013",

}

TY - GEN

T1 - III-as pillar arrays by metal-assisted chemical etching for photonic applications

AU - Mohseni, Parsian K.

AU - Pan, Lei

AU - Zhao, Xiang

AU - Kim, Seung Hyun

AU - Balasundaram, Karthik

AU - Kim, Jeong Dong

AU - Coleman, James J.

AU - Li, Xiuling

PY - 2013

Y1 - 2013

N2 - Ordered arrays of GaAs/InGaAs micro and nanopillars are formed by metal-assisted chemical etching (MacEtch). The dependence of morphology and etch rate upon temperature, etchant composition, and doping concentration are explored and optical characteristics are discussed.

AB - Ordered arrays of GaAs/InGaAs micro and nanopillars are formed by metal-assisted chemical etching (MacEtch). The dependence of morphology and etch rate upon temperature, etchant composition, and doping concentration are explored and optical characteristics are discussed.

UR - http://www.scopus.com/inward/record.url?scp=84887453027&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84887453027&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84887453027

SN - 9781557529725

T3 - CLEO: Science and Innovations, CLEO_SI 2013

SP - CTh1J.3

BT - CLEO

T2 - CLEO: Science and Innovations, CLEO_SI 2013

Y2 - 9 June 2013 through 14 June 2013

ER -

III-as pillar arrays by metal-assisted chemical etching for photonic applications

Abstract

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Other

ASJC Scopus subject areas

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