Hydrogenated amorphous silicon films deposited by reactive sputtering: The electronic properties, hydrogen bonding and microstructure

M. Pinarbasi, N. Maley, A. Myers, J. R. Abelson

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)217-233
Number of pages17
JournalThin Solid Films
Issue number1
StatePublished - Apr 1 1989

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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