Hydrogen release kinetics during reactive magnetron sputter deposition of a-Si:H: An isotope labeling study

John R Abelson, L. Mandrell, J. R. Doyle

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Hydrogen release kinetics during reactive magnetron sputter deposition of a-Si:H: An isotope labeling study'. Together they form a unique fingerprint.

Physics & Astronomy