Hybrid techniques for electrostatic analysis of nanoelectromechanical systems

An approach, referred to as the hybrid boundary integral formulation (BIE)/poisson/Schrodinger approach, for electrostatic analysis of number of nanoelectromechanical device and system (NEMS) was proposed. Poisson equation and BIE of the potential equation described the interior and exterior domain electrostatics respectively. A meshless finite cloud method and a boundary cloud method were employed to solve the coupled BIE/poisson/schrodinger's equations self-consistently. It was suggested that the proposed approach significantly reduced the computational cost and provides a higher accuracy of the solution.