Hybrid Method For Depositing Semi-conductive Materials

Angus Rockett (Inventor), John A Thornton (Inventor), Timothy Lommasson (Inventor)

Research output: Patent


The invention provides a method and apparatus for depositing alloy films useful in manufacturing photovoltaic solar cells. In the preferred embodiment an alloy comprising copper, indium, and selenium is deposited on a substrate. Sputtering is utilized to provide the copper and indium, with the selenium being provided by evaporization. Other alloys may also be formed using the disclosed apparatus and techniques.
Original languageEnglish (US)
U.S. patent number5439575
StatePublished - Aug 8 1995


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