Holographic patterning of high-performance on-chip 3D lithium-ion microbatteries

Keyphrases

• High Performance 100%
• On chip 100%
• Mesostructure 100%
• Lithium-ion Microbatteries 100%
• Holographic Patterning 100%
• Microbatteries 66%
• Holographic Lithography 66%
• On-chip Integration 66%
• Light-emitting Diodes 33%
• Micro-electro-mechanical Systems 33%
• Spatial Distribution 33%
• Li-ion 33%
• Low Power 33%
• Conventional Photolithography 33%
• Capacity Fade 33%
• High Energy Density 33%
• Deterministic Control 33%
• Great Powers 33%
• Full Cell 33%
• Peak Current 33%
• Increased Demand 33%
• Solid Electrodes 33%
• Thin-film Battery 33%
• Supercapacitor 33%
• Design Flexibility 33%
• Electrode Design 33%
• Unique Design 33%
• Personal Health Systems 33%
• Wireless Communication Device 33%
• Internal Electrodes 33%
• Integrated Power Source 33%
• Electrode Mesostructure 33%
• 3D Microbattery 33%
• LiMnO2 33%
• Three-dimensional Electrode 33%

Engineering

• Energy Engineering 100%
• Battery (Electrochemical Energy Engineering) 100%
• Lithography 100%
• Microelectromechanical System 50%
• Thin Films 50%
• Illustrates 50%
• Light-Emitting Diode 50%
• Energy Density 50%
• Spatial Distribution 50%
• Internals 50%
• Optical Lithography 50%
• Increasing Demand 50%
• Structural Parameter 50%
• Power Source 50%
• Modeling Study 50%
• Health Monitoring System 50%
• Wireless Communication 50%
• Supercapacitor 50%

Material Science

• Battery (Electrochemical Energy Engineering) 100%
• Lithography 100%
• Lithium Ion 100%
• Microelectromechanical System 50%
• Thin Films 50%
• Cathode 50%
• Energy Density 50%
• Light-Emitting Diode 50%
• Anode 50%
• Supercapacitors 50%