@inproceedings{5561b373573543d68ab236887f1d4793,
title = "Highly uniform and reproducible visible to near-infrared vertical-cavity surface-emitting lasers grown by MOVPE",
abstract = "We present the growth and characterization of vertical- cavity surface emitting lasers (VCSELs) from visible to near-infrared wavelength grown by metalorganic vapor phase epitaxy. Discussions on the growth issue of VCSEL materials include the control on growth rate and composition using an in situ normal-incidence reflectometer, optimization of ultra-high material uniformity, and comprehensive p- and n- type doping study in AlGaAs by CCl4 and Si2H6 over the entire Al composition range. We also demonstrate our recent achievements of selectively oxidized VCSELs which include the first room-temperature continues-wave demonstration of all-AlGaAs 700-nm red VCSELs, high- performance n-side up 850-nm VCSELs, and low threshold current and low-threshold voltage 1.06 micrometer VCSELs using InGaAs/GaAsP strain-compensated quantum wells.",
author = "Hou, {Hong Q.} and Choquette, {Kent D.} and Hammons, {B. E.} and Breiland, {William G.} and {Hagerott Crawford}, Mary and Lear, {Kevin L.}",
year = "1997",
language = "English (US)",
isbn = "0819424145",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Society of Photo-Optical Instrumentation Engineers",
pages = "34--45",
editor = "Choquette, {Kent D.} and Deppe, {Dennis G.}",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Vertical-Cavity Surface-Emitting Lasers ; Conference date: 13-02-1997 Through 14-02-1997",
}