Vertical-cavity surface-emitting lasers (VCSEL's) were grown by metalorganic vapor phase epitaxy. Excellent uniformity of Fabry-Perot cavity wavelength for VCSEL materials of ±0.2% across a 3-in diameter wafer was achieved. This results in excellent uniformity of the lasing wavelength and threshold current of VCSEL devices. Employing pregrowth calibrations on growth rates periodically with an in situ reflectometer, we obtained a run-to-run wavelength reproducibility for 770- and 850-nm VCSEL's of ±0.3% over the course of more than a hundred runs.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering