Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metallorganic chemical vapor deposition

H. Q. Hou; H. C. Chui; K. D. Choquette; B. E. Hammons; W. G. Brieland; K. M. Geib

Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metallorganic chemical vapor deposition

H. Q. Hou, H. C. Chui, K. D. Choquette, B. E. Hammons, W. G. Brieland, K. M. Geib

Research output: Contribution to journal › Conference article › peer-review

Abstract

Metallorganic chemical vapor deposition (MOCVD) technology is increasingly recognised as a superior platform for growth of vertical-cavity surface-emitting lasers (VCELs) because of its high throughput, low surface defect density, continuous compositional grading control, and the flexibility for materials and dopant choices. In this paper, it is shown that it is also capable of extremely high wafer uniformity and run-to-run reproducibility.

Original language	English (US)
Pages (from-to)	279-280
Number of pages	2
Journal	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
State	Published - 1996
Externally published	Yes
Event	Proceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA Duration: Jun 2 1996 → Jun 7 1996

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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title = "Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metallorganic chemical vapor deposition",

abstract = "Metallorganic chemical vapor deposition (MOCVD) technology is increasingly recognised as a superior platform for growth of vertical-cavity surface-emitting lasers (VCELs) because of its high throughput, low surface defect density, continuous compositional grading control, and the flexibility for materials and dopant choices. In this paper, it is shown that it is also capable of extremely high wafer uniformity and run-to-run reproducibility.",

author = "Hou, {H. Q.} and Chui, {H. C.} and Choquette, {K. D.} and Hammons, {B. E.} and Brieland, {W. G.} and Geib, {K. M.}",

year = "1996",

language = "English (US)",

pages = "279--280",

journal = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

issn = "1092-8081",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 ; Conference date: 02-06-1996 Through 07-06-1996",

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TY - JOUR

T1 - Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metallorganic chemical vapor deposition

AU - Hou, H. Q.

AU - Chui, H. C.

AU - Choquette, K. D.

AU - Hammons, B. E.

AU - Brieland, W. G.

AU - Geib, K. M.

PY - 1996

Y1 - 1996

N2 - Metallorganic chemical vapor deposition (MOCVD) technology is increasingly recognised as a superior platform for growth of vertical-cavity surface-emitting lasers (VCELs) because of its high throughput, low surface defect density, continuous compositional grading control, and the flexibility for materials and dopant choices. In this paper, it is shown that it is also capable of extremely high wafer uniformity and run-to-run reproducibility.

AB - Metallorganic chemical vapor deposition (MOCVD) technology is increasingly recognised as a superior platform for growth of vertical-cavity surface-emitting lasers (VCELs) because of its high throughput, low surface defect density, continuous compositional grading control, and the flexibility for materials and dopant choices. In this paper, it is shown that it is also capable of extremely high wafer uniformity and run-to-run reproducibility.

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M3 - Conference article

AN - SCOPUS:0029698278

SN - 1092-8081

SP - 279

EP - 280

JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

T2 - Proceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96

Y2 - 2 June 1996 through 7 June 1996

ER -

Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metallorganic chemical vapor deposition

Abstract

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