Abstract
The development and characterization of a new solid-state nanopore sensor for the detection of single DNA molecules was reported. The formation of nanopores in Al2O3 membranes results in the localized crystallization and faceted grain growth of hexagonal γ-Al 2O3 nanocrystallites in the vicinity of the pore, attributed to nanoscale thermal annealing and electron-beam assisted diffusion. Nanopores formed in MOS capacitors with thin SiO2 membranes report the possibility of single-nucleotide resolution with potential application to next-generation DNA sequencing systems. It is found that the damage mechanism in alumina during pore formation is attributed to the Knotek-Feibelman oxygen-ion desorption mechanism. The slow time scales show that the majority of current blockades observed are DNA-translocation events involving significant interactions with the pore surface.
Original language | English (US) |
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Pages (from-to) | 2771-2776 |
Number of pages | 6 |
Journal | Advanced Materials |
Volume | 21 |
Issue number | 27 |
DOIs | |
State | Published - Jul 20 2009 |
ASJC Scopus subject areas
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering