Highly linear, ultra sensitive bio-mems force sensors with large force measurement range

Jagannathan Rajagopalan; Alireza Tofangchi; M Taher A Saif

doi:10.1109/MEMSYS.2010.5442558

Highly linear, ultra sensitive bio-mems force sensors with large force measurement range

Jagannathan Rajagopalan, Alireza Tofangchi, M Taher A Saif

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We have designed, fabricated, and characterized a set of displacement based micromechanical force sensors. These sensors combine high force resolution (50-500 pN) with large force measurement range (100 nN- 1 μN) and have highly linear force-displacement characteristics. In addition, we have established a novel scheme to avoid capillary forces during the immersion and removal of these sensors from aqueous environments that make them highly suitable for biological studies. As a demonstration of their versatility, these sensors are used to measure the mechanical response of embryonic Drosophila (fruit fly) axons in vivo.

Original language	English (US)
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	88-91
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442558
State	Published - 2010
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: Jan 24 2010 → Jan 28 2010

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	1/24/10 → 1/28/10

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/MEMSYS.2010.5442558

Library availability

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Rajagopalan, J., Tofangchi, A., & Saif, M. T. A. (2010). Highly linear, ultra sensitive bio-mems force sensors with large force measurement range. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 88-91). Article 5442558 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442558

Highly linear, ultra sensitive bio-mems force sensors with large force measurement range. / Rajagopalan, Jagannathan; Tofangchi, Alireza; Saif, M Taher A.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 88-91 5442558 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Rajagopalan, J, Tofangchi, A & Saif, MTA 2010, Highly linear, ultra sensitive bio-mems force sensors with large force measurement range. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442558, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 88-91, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 1/24/10. https://doi.org/10.1109/MEMSYS.2010.5442558

Rajagopalan J, Tofangchi A, Saif MTA. Highly linear, ultra sensitive bio-mems force sensors with large force measurement range. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 88-91. 5442558. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442558

Rajagopalan, Jagannathan ; Tofangchi, Alireza ; Saif, M Taher A. / Highly linear, ultra sensitive bio-mems force sensors with large force measurement range. MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. pp. 88-91 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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Highly linear, ultra sensitive bio-mems force sensors with large force measurement range

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