Highly linear, ultra sensitive bio-mems force sensors with large force measurement range

Jagannathan Rajagopalan, Alireza Tofangchi, M Taher A Saif

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have designed, fabricated, and characterized a set of displacement based micromechanical force sensors. These sensors combine high force resolution (50-500 pN) with large force measurement range (100 nN- 1 μN) and have highly linear force-displacement characteristics. In addition, we have established a novel scheme to avoid capillary forces during the immersion and removal of these sensors from aqueous environments that make them highly suitable for biological studies. As a demonstration of their versatility, these sensors are used to measure the mechanical response of embryonic Drosophila (fruit fly) axons in vivo.

Original languageEnglish (US)
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages88-91
Number of pages4
DOIs
StatePublished - 2010
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: Jan 24 2010Jan 28 2010

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period1/24/101/28/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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    Rajagopalan, J., Tofangchi, A., & Saif, M. T. A. (2010). Highly linear, ultra sensitive bio-mems force sensors with large force measurement range. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 88-91). [5442558] https://doi.org/10.1109/MEMSYS.2010.5442558