Highly conformal film growth by chemical vapor deposition. I. A conformal zone diagram based on kinetics

A. Yanguas-Gil, Y. Yang, N. Kumar, J. R. Abelson

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Highly conformal film growth by chemical vapor deposition. I. A conformal zone diagram based on kinetics'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds