We report high temperature piezoresponse force microscopy (PFM) on 100 nm thick PbZr0.2Ti0.8O3 films fabricated on a miniature heater stage. The microfabricated resistive heater allows local temperature control up to 1000 C with minimal electrostatic interactions. The PFM measurements were used to collect piezoelectric hysteresis loops over the temperature range 25-400 C. The piezoresponse increases with temperature and then decreases rapidly near 400 C, which is indicative of ferroelectric- paraelectric phase transition.

Original languageEnglish (US)
Article number173103
JournalApplied Physics Letters
Issue number17
StatePublished - Oct 24 2011

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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