We report high temperature piezoresponse force microscopy (PFM) on 100 nm thick PbZr0.2Ti0.8O3 films fabricated on a miniature heater stage. The microfabricated resistive heater allows local temperature control up to 1000 C with minimal electrostatic interactions. The PFM measurements were used to collect piezoelectric hysteresis loops over the temperature range 25-400 C. The piezoresponse increases with temperature and then decreases rapidly near 400 C, which is indicative of ferroelectric- paraelectric phase transition.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)