High-temperature phase stability of hafnium aluminate films for alternative gate dielectrics

Yan Yang, Wenjuan Zhu, T. P. Ma, Susanne Stemmer

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'High-temperature phase stability of hafnium aluminate films for alternative gate dielectrics'. Together they form a unique fingerprint.

Physics & Astronomy