High speed mid-infrared detectors based on MEMS resonators and spectrally selective metamaterials

Michael Breen, Will Streyer, Ruochen Lu, Anming Gao, Daniel Wasserman, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work reports the development of uncooled spectrally selective mid-infrared (IR) detectors based on the seamless integration of metamaterial (MM) structures with microelec-tromechanical AlN resonators. The complete coverage of the resonator surface with MM results in high mid-IR absorption (>80%) at an optimized spectral wavelength of 9.6 μm with a Full Width at Half Maximum (FWHM) of 1.02 μm without compromising resonator acoustic performance. A novel detector readout has also been implemented to linearly convert incident IR power to a DC voltage and to demonstrate the potential for expanding our single element detector to a focal plane array imager. The measurements of the detectors have shown a high temperature coefficient of impedance (TCZ) of 9.6% a fast thermal response time of 400 μs, and a responsivity of 33 V/W.

Original languageEnglish (US)
Title of host publication2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509020911
DOIs
StatePublished - Aug 16 2016
Event70th IEEE International Frequency Control Symposium, IFCS 2016 - New Orleans, United States
Duration: May 9 2016May 12 2016

Publication series

Name2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings

Other

Other70th IEEE International Frequency Control Symposium, IFCS 2016
CountryUnited States
CityNew Orleans
Period5/9/165/12/16

Keywords

  • AlN
  • MEMS/NEMS
  • Metamaterial
  • Spectral Selectivity
  • mid-IR

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Instrumentation

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