@inproceedings{3ee732f4c2234384b6793ca06cda43a8,
title = "High speed mid-infrared detectors based on MEMS resonators and spectrally selective metamaterials",
abstract = "This work reports the development of uncooled spectrally selective mid-infrared (IR) detectors based on the seamless integration of metamaterial (MM) structures with microelec-tromechanical AlN resonators. The complete coverage of the resonator surface with MM results in high mid-IR absorption (>80%) at an optimized spectral wavelength of 9.6 μm with a Full Width at Half Maximum (FWHM) of 1.02 μm without compromising resonator acoustic performance. A novel detector readout has also been implemented to linearly convert incident IR power to a DC voltage and to demonstrate the potential for expanding our single element detector to a focal plane array imager. The measurements of the detectors have shown a high temperature coefficient of impedance (TCZ) of 9.6% a fast thermal response time of 400 μs, and a responsivity of 33 V/W.",
keywords = "AlN, MEMS/NEMS, Metamaterial, Spectral Selectivity, mid-IR",
author = "Michael Breen and Will Streyer and Ruochen Lu and Anming Gao and Daniel Wasserman and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 70th IEEE International Frequency Control Symposium, IFCS 2016 ; Conference date: 09-05-2016 Through 12-05-2016",
year = "2016",
month = aug,
day = "16",
doi = "10.1109/FCS.2016.7546721",
language = "English (US)",
series = "2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings",
address = "United States",
}