Abstract
A high speed and high responsivity vertical InGaAs-based Schottky photodetector was designed and fabricated It utilizes a lattice matched InAlAs Schottky barrier height enhancement layer and a film of indium tin oxide (ITO) to form both a Schottky contact and an antireflective coating to 1.31 μm optical radiation. Responsivities of up to 0.59 A/W were obtained in conjunction with dark current densities below 1.10-4 A/cm2 and 3-db bandwidths of 25 GHz.
Original language | English (US) |
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Pages (from-to) | 490-493 |
Number of pages | 4 |
Journal | Conference Proceedings - International Conference on Indium Phosphide and Related Materials |
State | Published - 1997 |
Event | Proceedings of the 1997 International Conference on Indium Phosphide and Related Materials - Cape Cod, MA, USA Duration: May 11 1997 → May 15 1997 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering