High speed and parallel nanoimaging using an array of heated atomic force microscope cantilevers

S. Somnath, H. Kim, H. Hu, William Paul King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report high speed and parallel nanotopography imaging using an array of heated microcantilevers integrated into a commercial atomic force microscope (AFM). The array has five silicon cantilevers with embedded resistive heaters whose temperatures can be controlled independently. The cantilever temperatures are independently controlled using feedback loops implemented via high speed analog circuitry. The heated cantilevers can measure surface nanotopograpy by measuring the changes in heat flow as the cantilevers scan over the surface. We demonstrate imaging of nanostructures of height 25-100 nm using the cantilever array over an area 550 μm × 90 μm. The resulting image was a 3.1 million pixel image, acquired in 62 seconds. The vertical resolution was 0.6 nm for a pixel size 351 nm × 45 nm.

Original languageEnglish (US)
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1493-1496
Number of pages4
DOIs
StatePublished - 2013
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: Jun 16 2013Jun 20 2013

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/TerritorySpain
CityBarcelona
Period6/16/136/20/13

Keywords

  • Atomic force microscope
  • cantilever array
  • scanning thermal microscopy

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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