Abstract
The electron diffraction strain measurement technique and its application to strain in shallow trench isolation (STI) device structures was analyzed. It was shown that polysilazane-based inorganic spin-on-glass (P-SOGS) filling leads to a lower stress level and the accuracy of our pattern matching technique at 0.02% using convergent-beam electron diffraction (CBED) technique. It was found that CBED technique improved the sample orientation which were required for techniques based on high-order Laue zone (HOLZ) line fitting using kinematical approximation. The spatial resolution was improved by using electron nano-probe in a field emission TEM.
Original language | English (US) |
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Pages (from-to) | 2181-2183 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 84 |
Issue number | 12 |
DOIs | |
State | Published - Mar 22 2004 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)