The electron diffraction strain measurement technique and its application to strain in shallow trench isolation (STI) device structures was analyzed. It was shown that polysilazane-based inorganic spin-on-glass (P-SOGS) filling leads to a lower stress level and the accuracy of our pattern matching technique at 0.02% using convergent-beam electron diffraction (CBED) technique. It was found that CBED technique improved the sample orientation which were required for techniques based on high-order Laue zone (HOLZ) line fitting using kinematical approximation. The spatial resolution was improved by using electron nano-probe in a field emission TEM.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)