@article{d234ede66b4845eeb21e7c9edbde6600,
title = "High-resolution nanofabrication using a highly focused electron beam",
abstract = "A highly focused electron beam can be used to shape nanodevices. We demonstrate electron beam etching of nanoholes through multiwalled carbon nanotubes (MWNTs) and niobium nanowires. Nanoholes, as small as ∼2.5 nm in diameter, can be reproducibly fabricated. This technique can also be used to fabricate constrictions and larger nanoholes in MWNTs. We argue that with some improvement, this technique might be used to pattern suspended graphene by the removal of targeted single atoms.",
author = "Thomas Aref and Mikas Remeika and Alexey Bezryadin",
note = "Funding Information: The authors thank M. Brenner for assistance with wire fabrication, J. Wen and C. Lei for TEM training, M. Marshall for FIB training, and Prof. R. Giannetta for the use of his milling machine. This work was supported by the (U.S.) Department of Energy under Grant No. DE-FG02–07ER46453. This work was carried out in part in the Frederick Seitz Materials Research Laboratory Central Facilities, University of Illinois, which are partially supported by the (U.S.) Department of Energy under Grant Nos. DE-FG02–07ER46453 and DE-FG02–07ER46471.",
year = "2008",
doi = "10.1063/1.2957590",
language = "English (US)",
volume = "104",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "2",
}