High-resolution nanofabrication using a highly focused electron beam

Thomas Aref, Mikas Remeika, Alexey Bezryadin

Research output: Contribution to journalArticlepeer-review


A highly focused electron beam can be used to shape nanodevices. We demonstrate electron beam etching of nanoholes through multiwalled carbon nanotubes (MWNTs) and niobium nanowires. Nanoholes, as small as ∼2.5 nm in diameter, can be reproducibly fabricated. This technique can also be used to fabricate constrictions and larger nanoholes in MWNTs. We argue that with some improvement, this technique might be used to pattern suspended graphene by the removal of targeted single atoms.

Original languageEnglish (US)
Article number024312
JournalJournal of Applied Physics
Issue number2
StatePublished - 2008

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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