High resolution microplasma arrays fabricated in aluminum foil: Improved device performance in the microcavity and mi crochanne structure

Addressable, self-assembled Al electrodes enclosed by Al₂O ₃ have been fabricated to the shape of microcavity and microchannel arrays. Improved luminance and luminous efficacies approaching 4 lumens/W have been observed for large micro-plasma arrays with parabolic cross-sectional Al₂O₃ microcavities operating in Ne/Xe gas mixtures. Precise control of the cross-sectional geometry and surface morphology of the cavities within Al/Al₂O₃ microplasma devices having a dielectric barrier structure has been achieved with a sequence of wet electrochemical processes.