High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

Jae Woong Jeong; Bryan Park; Hohyun Keum; Seok Kim; John A. Rogers; Olav Solgaard

doi:10.1109/OMN.2013.6659040

High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

Jae Woong Jeong, Bryan Park, Hohyun Keum, Seok Kim, John A. Rogers, Olav Solgaard

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm∼1505nm and above 90% over the wavelength band of 1550∼1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.

Original language	English (US)
Title of host publication	Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages	23-24
Number of pages	2
DOIs	https://doi.org/10.1109/OMN.2013.6659040
State	Published - 2013
Externally published	Yes
Event	2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan Duration: Aug 18 2013 → Aug 22 2013

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
Country/Territory	Japan
City	Kanazawa
Period	8/18/13 → 8/22/13

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Online availability

10.1109/OMN.2013.6659040

Library availability

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Jeong, J. W., Park, B., Keum, H., Kim, S., Rogers, J. A., & Solgaard, O. (2013). High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing. In Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings (pp. 23-24). Article 6659040 (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMN.2013.6659040

High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing. / Jeong, Jae Woong; Park, Bryan; Keum, Hohyun et al.
Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings. 2013. p. 23-24 6659040 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Jeong, JW, Park, B, Keum, H, Kim, S, Rogers, JA & Solgaard, O 2013, High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing. in Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings., 6659040, International Conference on Optical MEMS and Nanophotonics, pp. 23-24, 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013, Kanazawa, Japan, 8/18/13. https://doi.org/10.1109/OMN.2013.6659040

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abstract = "We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm∼1505nm and above 90% over the wavelength band of 1550∼1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.",

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High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

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