Abstract
This paper reports on the demonstrations of first-order antisymmetric Lamb wave (A1) mode resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless communication. The sub-6 GHz resonance in this work is achieved by employing the A1 mode in the micromachined Y-cut Lithium Niobate (LiNbO3) thin films. The spurious modes mitigation is achieved by optimizing the distribution of the electric field. The demonstrated figure-of-merit ( $\text {FoM}=Q\cdot k_{t}^{2}$ ) of 435 marks the first time that a new resonator technology with the FoMs exceeds those of surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) in the sub-6 GHz (1-6 GHz) frequency range. [2019-0241].
Original language | English (US) |
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Article number | 8982187 |
Pages (from-to) | 135-143 |
Number of pages | 9 |
Journal | Journal of Microelectromechanical Systems |
Volume | 29 |
Issue number | 2 |
DOIs | |
State | Published - Apr 2020 |
Keywords
- 5G
- IoT
- MEMS
- Sub-6 GHz
- acoustic resonator
- lithium niobate
- spurious suppression
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering