High Q Antisymmetric Mode Lithium Niobate MEMS Resonators with Spurious Mitigation

Yansong Yang, Ruochen Lu, Songbin Gong

Research output: Contribution to journalArticlepeer-review

Abstract

This paper reports on the demonstrations of first-order antisymmetric Lamb wave (A1) mode resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless communication. The sub-6 GHz resonance in this work is achieved by employing the A1 mode in the micromachined Y-cut Lithium Niobate (LiNbO3) thin films. The spurious modes mitigation is achieved by optimizing the distribution of the electric field. The demonstrated figure-of-merit ( $\text {FoM}=Q\cdot k_{t}^{2}$ ) of 435 marks the first time that a new resonator technology with the FoMs exceeds those of surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) in the sub-6 GHz (1-6 GHz) frequency range. [2019-0241].

Original language English (US) 8982187 135-143 9 Journal of Microelectromechanical Systems 29 2 https://doi.org/10.1109/JMEMS.2020.2967784 Published - Apr 2020

Keywords

• 5G
• IoT
• MEMS
• Sub-6 GHz
• acoustic resonator
• lithium niobate
• spurious suppression

ASJC Scopus subject areas

• Mechanical Engineering
• Electrical and Electronic Engineering

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