High precision silicon-on-insulator MEMS parallel kinematic stages

Jingyan Dong (Inventor), Deepkishore Mukhopadhyay (Inventor), Placid M Ferreira (Inventor)

Research output: Patent


MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably connect the actuator to a movable end stage provide independent motion from each of the actuators that minimizes unwanted off-axis displacement, particularly for three-dimensional movement of a cantilever. Also provided are methods for using and making MEMS stages. In an aspect, a process provides a unitary MEMS stage made from a silicon-on-insulator wafer that avoids any post-fabrication assembly steps. Further provided are various devices that incorporate any of the stages disclosed herein, such as devices requiring accurate positioning systems in applications including scanning probe microscopy, E-jet printing, near-field optic sensing, cell probing and material characterization.
Original languageEnglish (US)
U.S. patent number8310128
StatePublished - Nov 13 2012

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