High precision polymer deposition onto microcantilever sensors using electrohydrodynamic printing

James H. Pikul; Phil Graf; Sandipan Mishra; Kira Barton; Yongkwan Kim; John A Rogers; Andrew G Alleyne; Placid Mathew Ferreira; William Paul King

doi:10.1109/ICSENS.2010.5690653

High precision polymer deposition onto microcantilever sensors using electrohydrodynamic printing

James H. Pikul, Phil Graf, Sandipan Mishra, Kira Barton, Yongkwan Kim, John A Rogers, Andrew G Alleyne, Placid Mathew Ferreira, William Paul King

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The ability to deposit functional organic layers with micrometer-scale resolution and precision is critical to the sensitivity and performance of chemical or biological sensors based on microcantilevers. This paper reports the use of electrohydrodynamic jetting to deposit micrometer sized droplets of pure polymer. The polymer droplets were deposited onto microcantilever sensors, with control over droplet size, location, and spacing. Cantilever-based gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 150-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution than current methods.

Original language	English (US)
Title of host publication	IEEE Sensors 2010 Conference, SENSORS 2010
Pages	2239-2242
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2010.5690653
State	Published - 2010
Event	9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States Duration: Nov 1 2010 → Nov 4 2010

Publication series

Name	Proceedings of IEEE Sensors

Other

Other	9th IEEE Sensors Conference 2010, SENSORS 2010
Country/Territory	United States
City	Waikoloa, HI
Period	11/1/10 → 11/4/10

ASJC Scopus subject areas

Electrical and Electronic Engineering

Online availability

10.1109/ICSENS.2010.5690653

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Pikul, J. H., Graf, P., Mishra, S., Barton, K., Kim, Y., Rogers, J. A., Alleyne, A. G., Ferreira, P. M., & King, W. P. (2010). High precision polymer deposition onto microcantilever sensors using electrohydrodynamic printing. In IEEE Sensors 2010 Conference, SENSORS 2010 (pp. 2239-2242). Article 5690653 (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2010.5690653

Pikul, JH, Graf, P, Mishra, S, Barton, K, Kim, Y, Rogers, JA, Alleyne, AG, Ferreira, PM & King, WP 2010, High precision polymer deposition onto microcantilever sensors using electrohydrodynamic printing. in IEEE Sensors 2010 Conference, SENSORS 2010., 5690653, Proceedings of IEEE Sensors, pp. 2239-2242, 9th IEEE Sensors Conference 2010, SENSORS 2010, Waikoloa, HI, United States, 11/1/10. https://doi.org/10.1109/ICSENS.2010.5690653

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title = "High precision polymer deposition onto microcantilever sensors using electrohydrodynamic printing",

abstract = "The ability to deposit functional organic layers with micrometer-scale resolution and precision is critical to the sensitivity and performance of chemical or biological sensors based on microcantilevers. This paper reports the use of electrohydrodynamic jetting to deposit micrometer sized droplets of pure polymer. The polymer droplets were deposited onto microcantilever sensors, with control over droplet size, location, and spacing. Cantilever-based gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 150-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution than current methods.",

author = "Pikul, {James H.} and Phil Graf and Sandipan Mishra and Kira Barton and Yongkwan Kim and Rogers, {John A} and Alleyne, {Andrew G} and Ferreira, {Placid Mathew} and King, {William Paul}",

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doi = "10.1109/ICSENS.2010.5690653",

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AU - Mishra, Sandipan

AU - Barton, Kira

AU - Kim, Yongkwan

AU - Rogers, John A

AU - Alleyne, Andrew G

AU - Ferreira, Placid Mathew

AU - King, William Paul

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N2 - The ability to deposit functional organic layers with micrometer-scale resolution and precision is critical to the sensitivity and performance of chemical or biological sensors based on microcantilevers. This paper reports the use of electrohydrodynamic jetting to deposit micrometer sized droplets of pure polymer. The polymer droplets were deposited onto microcantilever sensors, with control over droplet size, location, and spacing. Cantilever-based gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 150-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution than current methods.

AB - The ability to deposit functional organic layers with micrometer-scale resolution and precision is critical to the sensitivity and performance of chemical or biological sensors based on microcantilevers. This paper reports the use of electrohydrodynamic jetting to deposit micrometer sized droplets of pure polymer. The polymer droplets were deposited onto microcantilever sensors, with control over droplet size, location, and spacing. Cantilever-based gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 150-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution than current methods.

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High precision polymer deposition onto microcantilever sensors using electrohydrodynamic printing

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