High precision polymer deposition onto microcantilever sensors using electrohydrodynamic printing

James H. Pikul, Phil Graf, Sandipan Mishra, Kira Barton, Yongkwan Kim, John A Rogers, Andrew G Alleyne, Placid Mathew Ferreira, William Paul King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The ability to deposit functional organic layers with micrometer-scale resolution and precision is critical to the sensitivity and performance of chemical or biological sensors based on microcantilevers. This paper reports the use of electrohydrodynamic jetting to deposit micrometer sized droplets of pure polymer. The polymer droplets were deposited onto microcantilever sensors, with control over droplet size, location, and spacing. Cantilever-based gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 150-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution than current methods.

Original languageEnglish (US)
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages2239-2242
Number of pages4
DOIs
StatePublished - Dec 1 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
CountryUnited States
CityWaikoloa, HI
Period11/1/1011/4/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Pikul, J. H., Graf, P., Mishra, S., Barton, K., Kim, Y., Rogers, J. A., Alleyne, A. G., Ferreira, P. M., & King, W. P. (2010). High precision polymer deposition onto microcantilever sensors using electrohydrodynamic printing. In IEEE Sensors 2010 Conference, SENSORS 2010 (pp. 2239-2242). [5690653] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2010.5690653