High precision electrohydrodynamic printing of polymer onto microcantilever sensors

James H. Pikul; Phil Graf; Sandipan Mishra; Kira Barton; Yong Kwan Kim; John A. Rogers; Andrew Alleyne; Placid M. Ferreira; William P. King

doi:10.1109/JSEN.2011.2127472

High precision electrohydrodynamic printing of polymer onto microcantilever sensors

James H. Pikul
, Phil Graf
, Sandipan Mishra
, Kira Barton
, Yong Kwan Kim
, John A. Rogers
, Andrew Alleyne
, Placid M. Ferreira
, William P. King

Research output: Contribution to journal › Article › peer-review

Abstract

We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

Original language	English (US)
Article number	5729782
Pages (from-to)	2246-2253
Number of pages	8
Journal	IEEE Sensors Journal
Volume	11
Issue number	10
DOIs	https://doi.org/10.1109/JSEN.2011.2127472
State	Published - 2011

Keywords

Electrohydrodynamics
mass sensing
microcantilever
microelectromechanical systems
polymer deposition
polymer printing
sensor

ASJC Scopus subject areas

Electrical and Electronic Engineering
Instrumentation

Online availability

10.1109/JSEN.2011.2127472

Library availability

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title = "High precision electrohydrodynamic printing of polymer onto microcantilever sensors",

abstract = "We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.",

keywords = "Electrohydrodynamics, mass sensing, microcantilever, microelectromechanical systems, polymer deposition, polymer printing, sensor",

author = "Pikul, \{James H.\} and Phil Graf and Sandipan Mishra and Kira Barton and Kim, \{Yong Kwan\} and Rogers, \{John A.\} and Andrew Alleyne and Ferreira, \{Placid M.\} and King, \{William P.\}",

note = "Manuscript received February 04, 2011; accepted March 06, 2011. Date of publication March 14, 2011; date of current version August 05, 2011. This work was supported in part by the NSF Center for Chemical-Electrical-Mechanical Manufacturing Systems, in part by the Defense Advanced Research Projects Agency, and in part by a Carver Fellowship for JHP. The associate editor coordinating the review of this paper and approving it for publication was Dr. Sandro Carrara.",

year = "2011",

doi = "10.1109/JSEN.2011.2127472",

language = "English (US)",

volume = "11",

pages = "2246--2253",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "10",

}

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AU - Pikul, James H.

AU - Graf, Phil

AU - Mishra, Sandipan

AU - Barton, Kira

AU - Kim, Yong Kwan

AU - Rogers, John A.

AU - Alleyne, Andrew

AU - Ferreira, Placid M.

AU - King, William P.

N1 - Manuscript received February 04, 2011; accepted March 06, 2011. Date of publication March 14, 2011; date of current version August 05, 2011. This work was supported in part by the NSF Center for Chemical-Electrical-Mechanical Manufacturing Systems, in part by the Defense Advanced Research Projects Agency, and in part by a Carver Fellowship for JHP. The associate editor coordinating the review of this paper and approving it for publication was Dr. Sandro Carrara.

PY - 2011

Y1 - 2011

N2 - We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

AB - We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

KW - Electrohydrodynamics

KW - mass sensing

KW - microcantilever

KW - microelectromechanical systems

KW - polymer deposition

KW - polymer printing

KW - sensor

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High precision electrohydrodynamic printing of polymer onto microcantilever sensors

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Keywords

ASJC Scopus subject areas

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