Abstract

We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

Original languageEnglish (US)
Article number5729782
Pages (from-to)2246-2253
Number of pages8
JournalIEEE Sensors Journal
Volume11
Issue number10
DOIs
StatePublished - Aug 22 2011

Keywords

  • Electrohydrodynamics
  • mass sensing
  • microcantilever
  • microelectromechanical systems
  • polymer deposition
  • polymer printing
  • sensor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

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