High precision electrohydrodynamic printing of polymer onto microcantilever sensors

James H. Pikul; Phil Graf; Sandipan Mishra; Kira Barton; Yong Kwan Kim; John A. Rogers; Andrew Alleyne; Placid M. Ferreira; William P. King

doi:10.1109/JSEN.2011.2127472

High precision electrohydrodynamic printing of polymer onto microcantilever sensors

James H. Pikul, Phil Graf, Sandipan Mishra, Kira Barton, Yong Kwan Kim, John A. Rogers, Andrew Alleyne, Placid M. Ferreira, William P. King

Research output: Contribution to journal › Article › peer-review

Abstract

We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

Original language	English (US)
Article number	5729782
Pages (from-to)	2246-2253
Number of pages	8
Journal	IEEE Sensors Journal
Volume	11
Issue number	10
DOIs	https://doi.org/10.1109/JSEN.2011.2127472
State	Published - 2011

Keywords

Electrohydrodynamics
mass sensing
microcantilever
microelectromechanical systems
polymer deposition
polymer printing
sensor

ASJC Scopus subject areas

Electrical and Electronic Engineering
Instrumentation

Online availability

10.1109/JSEN.2011.2127472

Library availability

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title = "High precision electrohydrodynamic printing of polymer onto microcantilever sensors",

abstract = "We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.",

keywords = "Electrohydrodynamics, mass sensing, microcantilever, microelectromechanical systems, polymer deposition, polymer printing, sensor",

author = "Pikul, {James H.} and Phil Graf and Sandipan Mishra and Kira Barton and Kim, {Yong Kwan} and Rogers, {John A.} and Andrew Alleyne and Ferreira, {Placid M.} and King, {William P.}",

note = "Funding Information: ∗This work is supported by The National Natural Science Foundation of China (No. 61877060) † Corresponding author",

year = "2011",

doi = "10.1109/JSEN.2011.2127472",

language = "English (US)",

volume = "11",

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AU - Pikul, James H.

AU - Graf, Phil

AU - Mishra, Sandipan

AU - Barton, Kira

AU - Kim, Yong Kwan

AU - Rogers, John A.

AU - Alleyne, Andrew

AU - Ferreira, Placid M.

AU - King, William P.

N1 - Funding Information: ∗This work is supported by The National Natural Science Foundation of China (No. 61877060) † Corresponding author

PY - 2011

Y1 - 2011

N2 - We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

AB - We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

KW - Electrohydrodynamics

KW - mass sensing

KW - microcantilever

KW - microelectromechanical systems

KW - polymer deposition

KW - polymer printing

KW - sensor

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High precision electrohydrodynamic printing of polymer onto microcantilever sensors

Abstract

Keywords

ASJC Scopus subject areas

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