High-Performance Packaged 3D Lithium-Ion Microbatteries Fabricated Using Imprint Lithography

Pengcheng Sun, Xiangming Li, Jinyou Shao, Paul V Braun

Research output: Contribution to journalArticlepeer-review


Fabrication of high-energy-density and high-power-density packaged long-cycle-life rechargeable microbatteries remains a considerable challenge. Here, high-performance microbatteries with high active volume fraction, thick, 3D-structured electrodes (V2 O5 cathode and Li metal anode) are realized through a combination of imprint lithography, self-assembly, and electrodeposition. To assist the critical challenge of hermetic packaging, the microbattery is infilled with a gel electrolyte. The packaged cell exhibits high areal energy and power densities of 1.24 J cm-2 and 75.5 mW cm-2 , respectively, and can be cycled 550 times in argon or 200 times in air with 75% capacity retention of the initial discharge capacity. An unpackaged cell, using a liquid electrolyte, provides a power density of 218 mW cm-2 . As far as it is known, the microbatteries have the highest peak power density among all reported microbatteries.

Original languageEnglish (US)
Article number2006229
Pages (from-to)e2006229
JournalAdvanced materials (Deerfield Beach, Fla.)
Issue number1
Early online dateNov 26 2020
StatePublished - Jan 7 2021


  • gel electrolytes
  • hermetic packaging
  • imprint lithography
  • microbatteries
  • thick 3D electrodes

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Materials Science(all)


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