High-Performance Carbon Nanotube Complementary Logic with End-Bonded Contacts

Keyphrases

• Annealing 20%
• Bonded Contact 100%
• Carbon Dissolution 20%
• Carbon Nanotubes 100%
• Carbon Solubility 20%
• CMOS Logic 20%
• CMOS Technology 40%
• Complementary Logic 100%
• Contact Formation 20%
• Contact Resistance 20%
• Contact Scheme 20%
• Contact Size 20%
• Downscaling 20%
• Field-effect Transistors 20%
• High Carbon 20%
• High Performance 100%
• Inverter 20%
• Logic Technology 20%
• Low Annealing Temperature 20%
• Low Resistance 20%
• Metal Carbides 20%
• Metal Contact 40%
• NFET 20%
• P-type Contact 20%
• Postcontact 20%
• Side-bonded 20%
• Size-independent 20%
• Sub-10 Nm 20%
• Sub-5 Nm 20%
• Successful Implementation 20%
• Technology Node 20%

Material Science

• Annealing 40%
• Carbon Nanotube 100%
• Contact Resistance 40%
• Field Effect Transistor 20%
• Metal Carbide 20%
• Silicon 20%

Engineering

• Annealing Temperature 20%
• Carbon Nanotube 100%
• Field-Effect Transistor 20%
• Metal Contact 40%
• Nodes 20%
• Successful Implementation 20%