High-Mobility MoS2Directly Grown on Polymer Substrate with Kinetics-Controlled Metal-Organic Chemical Vapor Deposition

Jihun Mun, Hyeji Park, Jaeseo Park, Daehwa Joung, Seoung Ki Lee, Juyoung Leem, Jae Min Myoung, Jonghoo Park, Soo Hwan Jeong, Won Chegal, Sungwoo Nam, Sang Woo Kang

Research output: Contribution to journalArticlepeer-review

Abstract

Batch growth of high-mobility (μFE > 10 cm2V-1s-1) molybdenum disulfide (MoS2) films can be achieved by means of the chemical vapor deposition (CVD) method at high temperatures (>500 °C) on rigid substrates. Although high-temperature growth guarantees film quality, time- and cost-consuming transfer processes are required to fabricate flexible devices. In contrast, low-temperature approaches (<250 °C) for direct growth on polymer substrates have thus far achieved film growth with limited spatial homogeneity and electrical performance (μFE is unreported). The growth of a high-mobility MoS2 film directly on a polymer substrate remains challenging. In this study, a novel low-temperature (250 °C) process to successfully overcome this challenge by kinetics-controlled metal-organic CVD (MOCVD) is proposed. Low-temperature MOCVD was achieved by maintaining the flux of an alkali-metal catalyst constant during the process; furthermore, MoS2 was directly synthesized on a polyimide (PI) substrate. The as-grown film exhibits a 4 in. wafer-scale uniformity, field-effect mobility of 10 cm2V-1s-1, and on/off ratio of 105, which are comparable with those of high-temperature-grown MoS2. The directly fabricated flexible MoS2 field-effect transistors demonstrate excellent stability of electrical properties following a 1000 cycle bending test with a 1 mm radius.

Original languageEnglish (US)
Pages (from-to)608-616
Number of pages9
JournalACS Applied Electronic Materials
Volume1
Issue number4
DOIs
StatePublished - Apr 23 2019
Externally publishedYes

Keywords

  • MoS
  • direct growth
  • flexible FET
  • kinetics-controlled MOCVD
  • low-temperature growth

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrochemistry
  • Materials Chemistry

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