High-k dielectric Al₂O₃ nanowire and nanoplate field effect sensors for improved pH sensing

Keyphrases

• Gate Dielectric 100%
• Nanoplates 100%
• PH Sensing 100%
• Al2O3 Nanowires 100%
• Field-effect Sensor 100%
• High-k Dielectric 100%
• Aluminum Oxide 60%
• Field-effect Transistors 60%
• Silica 40%
• Back-gate Bias 40%
• Nanowires 20%
• Fluidics 20%
• Process Optimization 20%
• Silicon-based 20%
• Integral Component 20%
• Label-free 20%
• Dielectric 20%
• Channel Thickness 20%
• Physical Thickness 20%
• Field-effect Transistor Sensor 20%
• Leakage Current 20%
• High-throughput Detection 20%
• Device Dimensions 20%
• Lab-on-chip Systems 20%
• Chemical Sensor 20%
• Effective Channel Thickness 20%
• Biological Sensor 20%
• Front Gate 20%
• Debye Length 20%

Engineering

• Nanowires 100%
• Gate Dielectric 100%
• Dielectrics 100%
• Field-Effect Transistor 80%
• Gate Bias 40%
• Nanoscale 20%
• Fluidics 20%
• Optimized Process 20%
• Process Result 20%
• Reduce Leakage 20%
• Debye Length 20%
• Effective Channel 20%
• Sensitive Detection 20%
• Chemical Sensor 20%
• System-on-Chip 20%

Material Science

• Al2O3 100%
• Nanowire 100%
• Dielectric Material 100%
• Field Effect Transistor 50%
• Silicon 37%
• Sensitive Detection 12%
• Fluidics 12%