Abstract
Metamorphic films were grown on GaAs substrates by solid source molecular-beam epitaxy for optical p-i-n photodetectors and transimpedance amplifiers. The surface roughness was studied using atomic force microscopy. The surface morphologies of the completed device structures were found to be specular to the eye. They also exhibited the characteristic cross-hatch pattern of metamorphic growth under Nomarski microscope contrast.
Original language | English (US) |
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Pages (from-to) | 1209-1212 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 20 |
Issue number | 3 |
DOIs | |
State | Published - May 2002 |
Externally published | Yes |
Event | 20th North American Conference on Molecular Beam Epitaxy - Providence, RI, United States Duration: Oct 1 2001 → Oct 3 2001 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering