High-fidelity simulation of rf inductively coupled plasma discharges

Sanjeev Kumar, Alessandro Munafò, Nagi N. Mansour, Marco Panesi

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The present work focuses on the study of non-equilibrium effects in radio frequency inductively coupled plasmas (ICP) using state-of-the-art state-to-state models. The fluid governing equations are discretized in space based on a cell-centered finite volume method. A preconditioned compressible formulation is adopted to tackle the stiffness resulting from low Mach numbers. Non-Local Thermodynamic Equilibrium (NLTE) calculations are performed using either multi-temperature or state-to-state models. Electromagnetic equations are solved via the finite element method, where H(curl) and H(Div) conforming finite element spaces are used for the electric and magnetic fields, respectively. Two solvers, one for the fluid and the other for the electromagnetic phenomena are coupled in an explicit fashion to model NLTE ICP discharges. Simulations performed using electronic state-to-state model show a significant deviation of the populations from the Boltzmann distribution.

Original languageEnglish (US)
Title of host publicationAIAA AVIATION 2022 Forum
PublisherAmerican Institute of Aeronautics and Astronautics Inc, AIAA
ISBN (Print)9781624106354
StatePublished - 2022
EventAIAA AVIATION 2022 Forum - Chicago, United States
Duration: Jun 27 2022Jul 1 2022

Publication series

NameAIAA AVIATION 2022 Forum


ConferenceAIAA AVIATION 2022 Forum
Country/TerritoryUnited States

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Nuclear Energy and Engineering
  • Aerospace Engineering


Dive into the research topics of 'High-fidelity simulation of rf inductively coupled plasma discharges'. Together they form a unique fingerprint.

Cite this