High electromechanical coupling MEMS resonators at 530 MHz using ion sliced X-cut LiNbO ₃ thin film

This paper reports on a new type of micro-resonators enabled by micromachining of ion sliced X-cut LiNbO ₃ thin films. In operation, the device is excited into lateral vibrations, thus allowing the center frequency to be determined by the lithographically defined dimensions of the excitation electrodes. This configuration enables highly integrated single-chip multi-frequency solutions for future wireless communications. The demonstrated devices have shown a high electromechanical coupling (k ²t) of 8.23% the highest attained for laterally vibrating MEMS resonators. Device orientation was also varied to investigate its impact on k ²t and experimental data have shown good agreement with theoretical predictions.