High electromechanical coupling MEMS resonators at 530 MHz using ion sliced X-cut LiNbO 3 thin film

Songbin Gong, Lisha Shi, Gianluca Piazza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on a new type of micro-resonators enabled by micromachining of ion sliced X-cut LiNbO 3 thin films. In operation, the device is excited into lateral vibrations, thus allowing the center frequency to be determined by the lithographically defined dimensions of the excitation electrodes. This configuration enables highly integrated single-chip multi-frequency solutions for future wireless communications. The demonstrated devices have shown a high electromechanical coupling (k 2t) of 8.23% the highest attained for laterally vibrating MEMS resonators. Device orientation was also varied to investigate its impact on k 2t and experimental data have shown good agreement with theoretical predictions.

Original languageEnglish (US)
Title of host publicationIMS 2012 - 2012 IEEE MTT-S International Microwave Symposium
DOIs
StatePublished - Oct 3 2012
Externally publishedYes
Event2012 IEEE MTT-S International Microwave Symposium, IMS 2012 - Montreal, QC, Canada
Duration: Jun 17 2012Jun 22 2012

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
ISSN (Print)0149-645X

Other

Other2012 IEEE MTT-S International Microwave Symposium, IMS 2012
Country/TerritoryCanada
CityMontreal, QC
Period6/17/126/22/12

Keywords

  • High electromechanical coupling
  • Lithium niobate
  • Piezoelectric resonators
  • Wideband filters

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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