@inproceedings{108dd29899964cbe813bb02e87279d3e,
title = "High-cyclic fatigue experiments of single crystal silicon in an oxygen-free environment",
abstract = "We report on the first study of fatigue in single crystal silicon MEMS resonators within an extremely clean and controlled environment using the 'epi-seal' encapsulation technology. This packaging technology provides a unique opportunity to investigate controversial issues in silicon fatigue since the devices are not exposed to air, oxygen, organics, or other residues that might complicate the initiation and observation of fatigue. We have conducted fatigue experiments on 10 devices over 1010 actuation cycles with various dynamic loadings ranging from 1.0 to 1.9 GPa at 29°C and from 0.2 to 1.1 GPa at 280°C. No fatigue related phenomena have been observed under these experimental conditions.",
author = "Shingo Yoneoka and Qu, {Yu Qiao} and Shasha Wang and Messana, {Matthew W.} and Graham, {Andrew B.} and James Salvia and Bongsang Kim and Renata Melamud and Gaurav Bahl and Kenny, {Thomas W.}",
year = "2010",
doi = "10.1109/MEMSYS.2010.5442524",
language = "English (US)",
isbn = "9781424457649",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "224--227",
booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",
note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",
}