High cycle MEMS device

Milton Feng (Inventor), David T Becher (Inventor), Shyh-Chiang Shen (Inventor), Richard Chan (Inventor), Nick Holonyak (Inventor)

Research output: Patent


A high life cycle and low voltage MEMS device. In an aspect of the invention, separate support posts are disposed to prevent a suspended switch pad from touching the actuation pad while permitting the switch pad to ground a signal line. In another aspect of the invention, cantilevered support beams are made from a thicker material than the switching pad. Increased thickness material in the cantilever tends to keep the switch flat in its resting position. Features of preferred embodiments include dimples in the switch pad to facilitate contact with a signal line and serpentine cantilevers arranged symmetrically to support the switch pad.
Original languageEnglish (US)
U.S. patent number6919784
Filing date7/9/02
StatePublished - Jul 19 2005


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