High bandwidth nano-positioner: A robust control approach

S. Salapaka; A. Sebastian; J. P. Cleveland; M. V. Salapaka

doi:10.1063/1.1499533

High bandwidth nano-positioner: A robust control approach

S. Salapaka, A. Sebastian, J. P. Cleveland, M. V. Salapaka

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	3232
Number of pages	1
Journal	Review of Scientific Instruments
Volume	73
Issue number	9
DOIs	https://doi.org/10.1063/1.1499533
State	Published - Sep 2002
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

Online availability

10.1063/1.1499533

Library availability

Discover UIUC Full Text

Cite this

@article{b5d1cc1ed29d4b4bbd032a1cae806018,

title = "High bandwidth nano-positioner: A robust control approach",

author = "S. Salapaka and A. Sebastian and Cleveland, {J. P.} and Salapaka, {M. V.}",

year = "2002",

month = sep,

doi = "10.1063/1.1499533",

language = "English (US)",

volume = "73",

pages = "3232",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "9",

}

TY - JOUR

T1 - High bandwidth nano-positioner

T2 - A robust control approach

AU - Salapaka, S.

AU - Sebastian, A.

AU - Cleveland, J. P.

AU - Salapaka, M. V.

PY - 2002/9

Y1 - 2002/9

UR - http://www.scopus.com/inward/record.url?scp=18544370052&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=18544370052&partnerID=8YFLogxK

U2 - 10.1063/1.1499533

DO - 10.1063/1.1499533

M3 - Article

AN - SCOPUS:18544370052

SN - 0034-6748

VL - 73

SP - 3232

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 9

ER -

High bandwidth nano-positioner: A robust control approach

ASJC Scopus subject areas

Online availability

Library availability

Related links

Cite this