Heavily nitrogen-doped dual-phase titanium oxide thin films by reactive sputtering and rapid thermal annealing

Qi Li, Jian Ku Shang

Research output: Contribution to journalArticle

Abstract

A novel nonequilibrium approach combining low-temperature reactive sputtering and rapid thermal annealing was developed to resolve the opposing requirements on crystallization and high dopant concentration for creating nitrogen-doped TiO2 (TiON) thin film with a mixture of anatase and rutile phases. The dual-phase TiON has a higher visible-light absorption and a smaller band gap than pure anatase TiON. Its superior photocatalytic performance was demonstrated by the highly hydrophilic conversion and faster photodegradation of organic pollutants under visible-light illumination. Our work demonstrates that the crystal structure is a major factor in determining the visible-light photocatalytic activity of TiON.

Original languageEnglish (US)
Pages (from-to)3167-3172
Number of pages6
JournalJournal of the American Ceramic Society
Volume91
Issue number10
DOIs
StatePublished - Oct 1 2008

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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