@inproceedings{ca40ff51ab1c4cb0bbf35a49bfab7578,
title = "Heated atomic force microscope cantilevers with wear-resistant ultrananocrystalline diamond tips",
abstract = "We report a wear-resistant ultrananocrystalline diamond (UNCD) tip integrated onto a heated atomic force microscope (AFM) cantilever. The batch-fabricated UNCD tips have tip radii of about 10 nm and heights up to 7 μm. The tips were wear-resistant throughout 1.2 m of scanning over a silicon grating at a force of 200 nN and a speed of 10 μm/s. Under the same conditions, a silicon tip was completely destroyed. When used for thermal imaging, the UNCD tip heated cantilever has a vertical imaging resolution of 1.9 nm. Finally, we demonstrate thermal nanolithography of hundreds of nano structures of polyethylene.",
author = "Kim, {H. J.} and N. Moldovan and Felts, {J. R.} and S. Somnath and Z. Dai and Jacobs, {T. D.B.} and Carpick, {R. W.} and Carlisle, {J. A.} and King, {William Paul}",
year = "2013",
doi = "10.1109/MEMSYS.2013.6474223",
language = "English (US)",
isbn = "9781467356558",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "245--248",
booktitle = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013",
note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",
}