Abstract
Experimental and theoretical studies of heat transport by lattice vibrations in thin film materials are reviewed. Selected examples of experimental methods are discussed to illustrate the wide variety of methods that have been developed for thin film measurements. Dielectric thin films are typically deposited at relatively low temperatures and therefore have significant atomic-scale disorder; thin film studies are placed in the context of the more general study of heat transport in strongly disordered materials. The finite thermal conductance of solid-solid interfaces reduces the effective thermal conductivity of ultrathin dielectric films and semiconductor superlattices.
Original language | English (US) |
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Pages (from-to) | 85-109 |
Number of pages | 25 |
Journal | Microscale Thermophysical Engineering |
Volume | 1 |
Issue number | 2 |
DOIs | |
State | Published - Apr 1 1997 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Materials Science (miscellaneous)
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
- Physics and Astronomy (miscellaneous)