Harnessing Mode Conversion for Spurious Mode Suppression in AlN Laterally Vibrating Resonators

Anming Gao, Songbin Gong

Research output: Contribution to journalArticle

Abstract

This paper reports on a spurious mode suppression technique for S0 mode aluminum nitride (AlN) laterally vibrating resonators. The technique utilizes a notch in the resonator body to convert spurious asymmetrical (A0) modes into the intended S0 mode vibration. Finite-element analyses were employed to theoretically investigate the mode conversion from A0 mode to S0 mode, and identify the optimal notch configuration. The technique has been experimentally validated to simultaneously eradicate the A0 spurious mode and enhance the S0 mode electromechanical coupling ( $k-{t}^{2}$ ) for the monolithically integrated resonators over a wide frequency range ( $100\sim 600$ MHz). It is a crucial technology development, because the spurious modes are a major bottleneck obstructing the deployment of single-chip multi-frequency AlN resonators as a commercially viable solution for radio frequency front-end filtering. [2015-0295]

Original languageEnglish (US)
Article number7446279
Pages (from-to)450-458
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume25
Issue number3
DOIs
StatePublished - Jun 2016

Keywords

  • Aluminum nitride
  • filters.
  • lamb wave
  • laterally vibrating resonators
  • microelectromechanical systems MEMS
  • mode conversion
  • radio frequency
  • spurious mode

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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