Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges

Shaloo Rakheja; Zhihong Chen; Ching Tzu Chen

doi:10.1063/5.0165095

Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges

Shaloo Rakheja
, Zhihong Chen
, Ching Tzu Chen

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Article number	030401
Journal	Applied Physics Letters
Volume	123
Issue number	3
Early online date	Jul 17 2023
DOIs	https://doi.org/10.1063/5.0165095
State	Published - Jul 17 2023

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Online availability

10.1063/5.0165095

Library availability

Discover UIUC Full Text

Cite this

@article{923c5c096316419989e04773dc02cda6,

title = "Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges",

author = "Shaloo Rakheja and Zhihong Chen and Chen, \{Ching Tzu\}",

note = "We would like to thank all the authors who have contributed to this Special Topic as well as the journal editors and staff who helped to put together this great collection.",

year = "2023",

month = jul,

day = "17",

doi = "10.1063/5.0165095",

language = "English (US)",

volume = "123",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "3",

}

TY - JOUR

T1 - Guest Editorial

T2 - Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges

AU - Rakheja, Shaloo

AU - Chen, Zhihong

AU - Chen, Ching Tzu

N1 - We would like to thank all the authors who have contributed to this Special Topic as well as the journal editors and staff who helped to put together this great collection.

PY - 2023/7/17

Y1 - 2023/7/17

UR - https://www.scopus.com/pages/publications/85166036693

UR - https://www.scopus.com/pages/publications/85166036693#tab=citedBy

U2 - 10.1063/5.0165095

DO - 10.1063/5.0165095

M3 - Editorial

AN - SCOPUS:85166036693

SN - 0003-6951

VL - 123

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 3

M1 - 030401

ER -

Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges

ASJC Scopus subject areas

Online availability

Library availability

Related links

Cite this