| Original language | English (US) |
|---|---|
| Article number | 030401 |
| Journal | Applied Physics Letters |
| Volume | 123 |
| Issue number | 3 |
| DOIs | |
| State | Published - Jul 17 2023 |
| Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges
Shaloo Rakheja, Zhihong Chen, Ching Tzu Chen
Research output: Contribution to journal › Editorial › peer-review