Growth, patterning, and weak-link fabrication of superconducting YBa 2Cu3O7-x thin films

G. C. Hilton; E. B. Harris; D. J. Van Harlingen

doi:10.1063/1.100657

Growth, patterning, and weak-link fabrication of superconducting YBa ₂Cu₃O_7-x thin films

G. C. Hilton, E. B. Harris, D. J. Van Harlingen

Research output: Contribution to journal › Article › peer-review

Abstract

We have grown thin films of the high-temperature superconducting ceramic oxides and investigated techniques for fabricating weak-link structures. Films of YBa₂Cu₃O_7-x grown on SrTiO₃ by a combination of dc magnetron sputtering and thermal evaporation from the three sources have been patterned into microbridges with widths down to 2 μm. We find evidence that the bridges behave as arrays of Josephson-coupled superconducting islands. Further weak-link behavior is induced by in situ modification of the coupling by ion milling through the bridge.

Original language	English (US)
Pages (from-to)	1107-1109
Number of pages	3
Journal	Applied Physics Letters
Volume	53
Issue number	12
DOIs	https://doi.org/10.1063/1.100657
State	Published - 1988

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.100657

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abstract = "We have grown thin films of the high-temperature superconducting ceramic oxides and investigated techniques for fabricating weak-link structures. Films of YBa2Cu3O7-x grown on SrTiO3 by a combination of dc magnetron sputtering and thermal evaporation from the three sources have been patterned into microbridges with widths down to 2 μm. We find evidence that the bridges behave as arrays of Josephson-coupled superconducting islands. Further weak-link behavior is induced by in situ modification of the coupling by ion milling through the bridge.",

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