Growth of superconducting Bi2Sr2Can-1CunOx thin films by atomically layered epitaxy

J. N. Eckstein, I. Bozovic, D. G. Schlom, J. S. Harris

Research output: Contribution to journalArticlepeer-review


We have developed a technique for atomically layering crystallized films of Bi2Sr2Can-1CunOx, in-situ, on SrTiO3 substrates. These compounds have a layered structure along the c-axis of the unit cell. To grow c-axis oriented films, atomic monolayers of the constituent atoms were sequentially deposited on hot substrates by shuttering the fluxes from thermal effusion cells in such a way as to build up the crystal structure of the film. Carious stable and metastable phases were grown in this way, along with atomically precise superlattice structures. Oxidation of the films was accomplished during growth using a beam of ozone. The films were superconducting as grown, with complete resistive transitions as high as 86 K. Moreover, reflection high energy electron diffraction (RHEED) patterns observed during growth, as well as post growth analysis by X-ray diffraction (XRD) and high resolution scanning electron micrography indicate the films to be single crystal and heteroepitaxial.

Original languageEnglish (US)
Pages (from-to)973-977
Number of pages5
JournalJournal of Crystal Growth
Issue number1-4
StatePublished - May 2 1991
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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