Growth of AlGaN/GaN heterojunction bipolar transistors by metalorganic chemical vapor deposition

  • D. J.H. Lambert
  • , J. J. Huang
  • , B. S. Shelton
  • , M. M. Wong
  • , U. Chowdhury
  • , T. G. Zhu
  • , H. K. Kwon
  • , Z. Liliental-Weber
  • , M. Benarama
  • , M. Feng
  • , R. D. Dupuis

Research output: Contribution to journalArticlepeer-review

Abstract

The growth and properties of AlGaN/GaN heterojunction bipolar transistors grown by low-pressure metalorganic chemical vapor deposition (MOCVD) are described. The `emitter-up' structures are grown on (0 0 0 1) sapphire substrates. Common-emitter characteristics and Gummel plots were measured on 120×120 μm2 devices and useable DC current gains of β approximately 8-14 were achieved at room temperature. The resistance of the base was a limiting factor in high-current operation of these devices.

Original languageEnglish (US)
Pages (from-to)730-733
Number of pages4
JournalJournal of Crystal Growth
Volume221
Issue number1-4
DOIs
StatePublished - Dec 2000

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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