Graded pore structure without phase mask

Shailesh Joshi (Inventor), Gaurav S Singhal (Inventor), Paul V. Braun (Inventor), Danny John Lohan (Inventor), Kai-Wei Lan (Inventor)

Research output: Patent

Abstract

A method to form a three-dimensional photonic crystal template with a gradient structure involves irradiating a photoresist composition of a thickness of at least 15 μm from at least four laser beams to yield a periodic patterned with a percolating matrix of mass in constructive volumes of a cured photoresist composition and destructive volumes of voids free of condensed matter where the proportion of constructive volume displays a gradient from the irradiated surface to the substrate after development. For a given light intensity, photoinitiator concentration in the photoresist composition, and a given thickness, by irradiating for a relatively short period, a three-dimensional photonic crystal template displaying a gradient having greater constructive volume proximal the air interface forms and a relatively long irradiation period results in a gradient having greater constructive volume proximal the substrate.
Original languageEnglish (US)
U.S. patent number11726236
Filing date8/5/21
StatePublished - Aug 15 2023

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