Gibbsian Segregating (GS) alloys: A potential solution to minimize collector degradation

Keyphrases

• Optics 100%
• Reflectivity 100%
• Surface Removal 100%
• Temperature Effect 50%
• Self-healing 50%
• Underground Physics 50%
• Surface Chemistry 50%
• Preferential Sputtering 50%
• Surface Concentration 50%
• Reflective Materials 50%
• Heavy Ions 50%
• Weak Effect 50%
• Enhancement Effect 50%
• Temperature Concentration 50%
• Sputtering System 50%
• Sacrificial Layer 50%
• Removal Rate 50%
• Collection Optics 50%
• Neutral Particles 50%
• EUV Lithography 50%
• Erosion-deposition 50%
• Solid Particle Erosion 50%
• Erosion Resistant 50%
• Magnetron Co-sputtering 50%
• Plasma Erosion 50%
• Plasma Debris 50%
• Dual Magnetron 50%
• Debris Deposition 50%
• Erosion Effect 50%
• Erosion Resistance 50%
• Removal Flux 50%
• Continuous Degradation 50%

Engineering

• Surface Concentration 100%
• Lithography 100%
• Magnetron 100%
• High Ion Energy 100%
• Removal Rate 100%
• Reflective Material 100%
• Erosion Resistance 100%