GHz AlN lateral overmoded bulk acoustic wave resonators with a f ̇ Q of 1.17 × 10¹³

Keyphrases

• Bulk Acoustic Wave Resonator 100%
• Overmoded 100%
• Coverage Rate 100%
• Phonons 50%
• Rectangular Plate 50%
• Metal Interfaces 50%
• Intrinsic Loss 50%
• Loss Mechanism 50%
• Phonon Dissipation 50%
• Product Value 50%
• AlN Thin Film 50%
• Interface Loss 50%
• Q-products 50%
• Temperature Coefficient of Frequency 50%

Engineering

• Thin Films 100%
• Resonator 100%
• Transducer 66%
• Piezoelectric 33%
• Rectangular Plate 33%
• Intrinsic Loss 33%
• Temperature Coefficient 33%
• Q Factor 33%

Material Science

• Resonator 100%
• Aluminum Nitride 100%
• Thin Films 50%
• Transducer 33%
• Piezoelectricity 16%
• Metal Interface 16%