GHz AlN lateral overmoded bulk acoustic wave resonators with a f ̇ Q of 1.17 × 1013

Songbin Gong, Nai Kuei Kuo, Gianluca Piazza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work presents a new class of devices, AlN-based lateral overmoded bulk acoustic wave resonators (LO-BAR), to investigate the Q limit imposed by the intrinsic loss of thin film AlN. The LOBAR devices utilize a rectangular AlN thin film plate with a small percentage (0.57%) inter-digitated transducer (IDT) fingers coverage to minimize the piezoelectric-metal interface loss. This design experimentally pushes the f ̇ Q product value (1.17×10 13) for thin-film AlN to magnitude level close to the theoretical limit predicted by the Akhizer effect (AKE) for AlN (2.5-5 × 10 13). To study the performance of the LOBAR design, the IDT to rectangular plate coverage ratio was varied. The results have shown that the Q of the LOBAR device scales nonlinearly and inversely with coverage ratio. Measurement of the highest Q LOBAR device for temperatures varying between 300 and 400 K have indicated that the AlN LOBAR has a temperature coefficient of frequency (TCF) of 16.25 ppm/K, and phonon-phonon dissipation (AKE) is not yet the dominant loss mechanism.

Original languageEnglish (US)
Title of host publication2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2011 - Proceedings
DOIs
StatePublished - Nov 7 2011
Externally publishedYes
Event5th Joint Conference of the 65th IEEE International Frequency Control Symposium, IFCS 2011 and 25th European Frequency and Time Forum, EFTF 2011 - San Fransisco, CA, United States
Duration: May 1 2011May 5 2011

Publication series

NameProceedings of the IEEE International Frequency Control Symposium and Exposition

Other

Other5th Joint Conference of the 65th IEEE International Frequency Control Symposium, IFCS 2011 and 25th European Frequency and Time Forum, EFTF 2011
CountryUnited States
CitySan Fransisco, CA
Period5/1/115/5/11

ASJC Scopus subject areas

  • Engineering(all)

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